Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection

This study presents the monolithic integration of humidity/flow/temperature sensors to realize an environmental hub for apparent-temperature detection. The design is based on TSMC 0.18µm 1P6M CMOS platform. Features of the proposed design are: (1) For system: SoC environmental hub for apparent-temperature detection, (2) For component: capacitive humidity sensors without moisture sensitive filler (polyimide), and (3) For component: suspended hot-wire flow sensors for thermal-isolation. Measurements demonstrate performances of the proposed environmental hub: humidity sensor with the highest sensitivity of 2.57fF/%RH, flow sensor with the highest normalized sensitivity of 0.95V/W/(m/s), and temperature sensor with a sensitivity of 0.66mV/℃. The apparent-temperature measurement is also demonstrated.