Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted Micromirrors

The Andromeda platform is a novel and flexible thin film Piezo MEMS technology platform for the manufacturing of laser-beam scanning mirrors, which is capable to cover a wide range of requirements (quasi static and resonant operation, opening angle, resonant frequency, mirror dimension and wavelength range application) and to achieve the target performances of different market applications, from AR/VR projection to LiDAR. The results of the characterization of different Andromeda products and their performance improvement allowed by PZT technology evolution are presented in this paper.