Mz Atomic Magnetometer Using A 3D Mems Glass Alkali Vapor Cell With Vertical Sidewalls

This paper reports a novel M
z
atomic magnetometer based on a low-cost 3D MEMS glass alkali vapor cell with vertical sidewalls for optical pumping/probing transmission. By designing vertical side walls, the 3D MEMS vapor cell provides high-quality centimeter-level optical paths for atom-photon interactions. The wafer-level high-quality multiple optical paths are also acquired for flexible M
z
atomic magnetometer designs. Experiments show that the sensitivity of the proposed Mz magnetometer is 3.7 pT/Hz
^1/2
at 1 Hz under 14000 nT.