Development of an Electrical Model of a Two-Layer Group Crossed Rectangular Spiral Inductor

This paper presents the development of an electrical model and verification with measured results of a planar group crossed rectangular inductor. The model consists of the self-inductance, series resistance, substrate capacitance, adjacent metal capacitance, and underpass capacitance of the inductor. Closed-form expressions have been formulated from the equiva-lent electrical model of the group crossed rectangular inductor. The measured results show that the proposed inductor has the inductance of 50 nH, with a maximum quality factor of 70 at a frequency of 175 MHz. In addition, the proposed inductor achieves a self-resonance frequency of 510 MHz, inductance density of 11.11 (nH/mm) and figure-of-merit of 37.11. Close agreement between the analytically calculated inductance and measured inductance of the group crossed rectangular inductor is observed, which validates the proposed model.