A Compact Standing Wave Ultrasonic Motor Using Collinear Layout

In order to meet the requirements for compact actuator in precision drive, a standing wave ultrasonic motor with collinear layout was proposed. The structure and working principle of this motor was introduced. With the help of commercial finite element analysis software ANSYS, the finite element model of the ultrasonic motor stator was established, the mode analysis was carried out, and the structure size of the stator was optimized. A prototype was made and tested to verify simulation results. The test results indicated that this motor can gain a maximum speed of 715mm/s and its thrust can reach 6N under preload of 0.5N and voltage of 300V
p-p
.