My LSI Development Experience at Toshiba (1973–1999): Hard Working, Exciting, and Splendid Days

The LSI technology evolution from the 6-
µ
m NMOS to the recent nano-CMOS is described based on my experience at Toshiba from 1973 to 1999. Unexpected problems often occurred, resulting in severe yield degradation and delays in development schedules. However, the severe problems and competitions among the strong rival companies have been the source of innovations and evolutions, having contributed to the realization of the super-intelligent society.