Modeling of dynamic hysteresis nonlinearity for piezo-positioning actuators

The dynamic hysteresis nonlinearity of the piezo-positioning actuators seriously affects the positioning accuracy. In order to accurately describe this dynamic hysteresis nonlinearity, a new modeling method is proposed by using the structure of Hammerstein model, where the static hysteresis nonlinear part is described by the Prandtl-Ishlinskii model, and the linear dynamic part is described by the system transfer function identified by the Hankel matrix. The experimental results show that when the input frequency is 1Hz to 100Hz, the root means square error of the proposed model is less than 0.3589pm and the relative error is less than 0.0200.