I. Introduction
In the process of aerosol research, a flow sensor is widely used as a very important sensitive element. Among various types of flow measurement sensors, differential pressure flowmeters are the most widely used in all flow measurement instrumentsl[1], [2]. The flowmeters has become one of the standard configurations of aerosol precision measurement instruments at present, and the accuracy of the flow measurement is related to the accuracy and stability of the instrument. The traditional mechanical flowmeters, such as differential pressure flowmeters, volumetric flowmeters, and variable area flowmeters, have been used widely. The flowmeters price competition is fierce, the profit margin is decreasing, the technological innovation is less, and the market is relatively mature. Frost & Sullivan sees product differentiation and customization as important breakthroughs for producers to survive in a highly competitive marketplace[3]. In particular, improving measurement accuracy and reducing production costs is the constant research direction of flowmeters.