Ferroelectric Materials: Enabling Programmable Process Control Monitors

Two circuits are presented as process control monitors for manufacturing of ferroelectric materials. Barium titanate is used as a characteristic ferroelectric material to construct two terminal ferroelectric capacitors. The measured remanent polarizations are extracted to simulate FeFET threshold voltages for use in programmable ring oscillators and racer modules to act as process assurance and validation circuits for manufacturing. In both the ring oscillator and racer module, the four distinct annealing processing conditions are able to be accurately distinguished from one another through both measured average behavior or standard deviation binning.