Thickness Control of Cantilever Beam for Robust and High-Power Mems Energy Harvester

This paper reports thickness controls for cantilever beams of the piezoelectric energy harvester (PEH). The uniform stress structure for increasing output power and fillet structures for stress concentration relief of cantilever beams were fabricated by thickness controls using the micro-loading effect, resulting in a 46% increase in power generation and a nearly two-fold increase in fracture strength compared to typical cantilever beams.