A Novel Silicon on Glass Electrostatic MEMS for Energy Harvesting in Leadless Pacemakers

In the present work we report the fabrication and characterization of a novel MEMS device intended to power leadless pacemakers. The presented device has the dimensions to fit inside a capsule implantable via cardiac catheterization. To our knowledge this is the first electrostatic MEMS energy harvester allowing such application. We show that the presented device has potential to match the average power consumption of commercial leadless pacemakers.