Surface Phenomena in Electronics Interconnection Technology-A Review

Surface phenomena are often at the origin of interconnection problems and it is necessary to study them with suitable analytical techniques. Auger electron spectroscopy (AES) is used here to establish the cause of observed failures at different levels of electronic interconnection. Failures are related to contamination: the most frequently encountered contaminants are carbonaceous compounds. It is suggested that manufacturing processes are the principal cause of such contaminants.