An analysis of latch-up prevention in CMOS IC's using an epitaxial-buried layer process

The use of a p
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buried layer beneath the p-well in CMOS is evaluated for controlling latch-up (parasitic SCR action). It is shown that this structure typically reduces the parasitic npn transistor's current gain by two orders of magnitude. The npn gain reduction is the principal mechanism for latch-up control. The npn has been studied using STRAP to numerically solve the transport equations. These simulations show the npn current gain to be primarily governed by the base-retarding field arising from the impurity gradient of the outdiffusing buried layer. A new wide-base lateral pnp model has been developed to accurately model the field enhancement of the parasitic lateral pnp's current gain. Experimental confirmation of the lateral pnp model is given.