High-speed MEMS-based gas chromatography

This paper reports microfabricated silicon-on-glass separation columns for high-speed gas chromatography systems. The columns are 25cm long with on-chip heaters and sensors for pressure and temperature. Programmed with temperature ramps of 10/spl deg/C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10s, including simulants for chemical warfare agents.