Abstract:
Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry. We describe a novel heterodyne interferometer for scanning surface-acous...Show MoreMetadata
Abstract:
Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry. We describe a novel heterodyne interferometer for scanning surface-acoustic waves at high frequencies, up to 6 GHz. The heterodyne operation facilitates the measurement of the absolute amplitude of the surface waves without calibration. It simultaneously also enables measuring the phase. The amplitude and phase information allows a precise characterization of the surface acoustic waves. Moreover, the wave motion can be visualized in the form of animations to gain insight. The interferometer has been tested by measuring a 167 MHz SPUDT device and a 374 MHz fan-shaped SAW filter.
Published in: IEEE Symposium on Ultrasonics, 2003
Date of Conference: 05-08 October 2003
Date Added to IEEE Xplore: 04 May 2004
Print ISBN:0-7803-7922-5