Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator

In this paper, we present useful modeling procedures intended to characterize and optimize MEMS resonator-filter designs. We address two major areas: (1) the impedance of the resonators as a function of frequency, assuming a given damping value, and (2) the numerical calculation of resonator Quality factor (Q) due to known damping mechanisms. The impedance calculation procedure is targeted towards piezoelectric MEMS resonators, while the Q calculations are more general. We show how these modeling approaches have been used to design and optimize our piezoelectric resonator for high Q and low impedance in the GHz frequency range.