SiON AR layer application for silicon solar cells

The experimental result of a more practical solar cell antireflection coating (ARC)- SiON film is presented. The advantage of employing SiON film is that PECVD grown SiON films needs less maintenance than grown SiN films. The thick deposited SiON attached on the PECVD chamber walls can be easily cleaned off by applying clean gas into the chamber; this can efficiently shorten equipment maintenance time, and increase production. In the SiON process, the desired film growth rate, reflectance, and refractive index are attainable by changing O/sub 2/ flow.