A Millimeter-Wave Microstrip Antenna Array on Ultra-Flexible Micromachined Polydimethylsiloxane (PDMS) Polymer

The use of polydimethylsiloxane (PDMS), an ultra flexible polymer, as a substrate for the realization of reconfigurable microwave devices in the 60-GHz band is presented. As bulk PDMS is demonstrated to be lossy at millimeter waves, membrane-supported devices are considered. A new reliable and robust technological process has been developed to micromachine membrane-supported transmission lines and microstrip antenna arrays. It is shown that transmission lines printed on 20-¿m-thick membranes exhibit similar performances as bulk substrates commonly used at millimeter-wave frequencies. A microstrip antenna array has been also designed and fabricated to demonstrate the feasibility of directive antennas supported by large membranes. Promising applications for mechanical beam-steering, beam-forming, and frequency-tunable antennas are expected.