Mo-Based Proximity Bilayers for TES: Microstructure and Properties

We report on the fabrication and characterization of Mo films, Mo/Au and Mo/Cu bilayers for Transition Edge Sensors (TES). The fabrication conditions (at room temperature) have been varied to achieve layers with the required properties for TES applications. The dependence of their functional properties (i.e. electrical resistivity and superconducting critical temperature) on microstructure (grain size, stress) is investigated.