High growth rate deposition techniques for coated conductors: liquid phase epitaxy and vapor-liquid-solid growth

High growth rate deposition techniques for coated conductors are developed via liquid phase epitaxy (LPE) and vapor-liquid-solid (VLS) growth. By adding fluorine and silver under low oxygen partial pressure, the processing temperature of LPE decreased down to 850/spl deg/C and it enabled us to grow YBCO on metallic substrates such as cube-textured silver tapes. On the other hand, VLS growth is a combinatorial deposition technique between vapor growth and LPE. It is essentially a LPE growth supplied from the vapor phase. Here, we discuss the utilization of VLS growth as a rapid vapor growth for production of YBCO coated conductor.