Proposal for a Micromachined Dynamically Tuned Gyroscope, Based on a Contactless Suspension

In this paper, the operating principle of a micromachined, dynamically tuned gyroscope, based on a contactless suspension is discussed and its mathematical model is derived. Dynamical analysis based on this mathematical model for the case in which the contactless suspension provides “hard” electrical springs is conducted. The analysis shows that such a gyroscope can be created in principal and provides a value for the gyroscope gain to measuring angular rate which is several orders of magnitude greater in comparison with existed prototypes of the micromachined gyroscope based on a contactless suspension.