Structural Optimization of Silicon-On-Insulator Slot Waveguides

In this letter, we theoretically investigate the potential for further improvement of the slot waveguide structure in silicon-on-insulator at a wavelength of 1550 nm. Waveguide thickness and width, as well as slot thickness are optimized with respect to the optical power confined in the slot region by taking into account the modal behavior of the structure. A single-mode criterion is defined as a function of the geometry parameters