Lithium micro-battery development at the Jet Propulsion Laboratory

Recent successes in the effort to miniaturize spacecraft components using MEMS technology, integrated passive components, and low power electronics have driven the need for very low power, low profile, low mass micro-power sources for micro/nanospacecraft applications. Recent work at JPL has focused upon developing thin film/micro-batteries compatible with temperature sensitive substrates. A process to prepare crystalline LiCoO/sub 2/ films with RF sputtering and moderate (<700/spl deg/C) annealing temperature has been developed. Thin film batteries with cathode films prepared with this process have specific capacities approaching the practical limit for LiCoO/sub 2/, with acceptable rate capabilities and discharge voltage profiles. Solid-state micro-scale batteries have also been fabricated with feature sizes on the order of 50 microns.