Abstract:
Selected micro- and nano-systems developed recently at the Physical Electronics Laboratory of ETH Zurich are reviewed: (i) a fluxgate microsystem for detection of the Ear...Show MoreMetadata
Abstract:
Selected micro- and nano-systems developed recently at the Physical Electronics Laboratory of ETH Zurich are reviewed: (i) a fluxgate microsystem for detection of the Earth's magnetic field; (ii) a capacitive chemical sensor microsystem for detection of volatile organic compounds in air; and (iii) a parallel scanning AFM chip. The micro- and nano-systems combine sensor structures and readout circuitry on a single chip and are fabricated using industrial CMOS technology in combination with post-processing micromachining and film deposition.
Published in: IEEE Aerospace and Electronic Systems Magazine ( Volume: 14, Issue: 10, October 1999)
DOI: 10.1109/62.799626