Abstract:
A Z-axis accelerometer with asymmetrical vertical sensing comb capacitors and high aspect ratio single crystal mechanical structures is presented. A 5-mask silicon-on-gla...Show MoreMetadata
Abstract:
A Z-axis accelerometer with asymmetrical vertical sensing comb capacitors and high aspect ratio single crystal mechanical structures is presented. A 5-mask silicon-on-glass (SOG) process combined with silicon/glass anodic bonding and multiple deep ion reactive etching (DRIE) is used to fabricate the accelerometer. With the specially designed out-of-plane springs, the accelerometer shows a cross-axis sensitivity of 0.46%. The scale factor and the non-linearity of the accelerometer are measured to be 172.5 mV/g and 0.47% with the input range of ±1 g (gravity), respectively. The noise floor of the accelerometer is 0.22 mg/Hz1/2 at 100 Hz and for a bandwidth of 400 Hz. The short term (10 min) zero bias stability of the fabricated accelerometer is also evaluated to be about 0.47 mg.
Published in: 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 05-08 March 2012
Date Added to IEEE Xplore: 10 May 2012
ISBN Information: