Reducing the temperature sensitivity of Love-wave sensors

Love waves are very advantageous for liquid sensing applications. Using a Love wave delay line as feedback element in an oscillator, allows to determine surface mass depositions on the delay line with high accuracy by monitoring oscillation frequency changes. This setup can be used for viscosity sensing and, using a chemical interface, for chemical sensing in liquids. In order to achieve a high effective sensitivity, the cross-sensitivity to temperature has to be kept low. In this contribution we discuss the choice of materials, crystal cut and the device parameters on the temperature coefficient of the sensor.