Capacitance characterization of dielectric charging effect in RF MEMS capacitive switches under different humidity environments

An analytical Capacitance-Voltage (CV) model is established according to the different situation of the up-state and down-state of the switch. By using the CV model, transient trapped charge response at different switch states and humidity levels are obtained. Different charging models according to different switch states are derived. Extracted model parameters of charging imply that injected charge quantity increases linearly with increasing humidity; the speed of charge injection at 50% and 80% RH is about 10 times faster than that at 20% RH.