1 Introduction
Three-dimensional IC stacking by means of Through-Silicon Vias (TSVs) is a relatively new technology which has a number of advantages over conventional stacking methodologies [1]. TSVs are vertical copper or tungsten conducting nails passing through a thinned die. Typical TSV dimensions are diameter and height. The actual connection to the next die can be a direct copper-to-copper bond of the TSV onto a small landing pad, but today is often implemented by means of a CuSn micro-bump, of which typical dimensions are diameter at pitch. As they form direct vertical interconnects between stacked dies, TSVs allow a much larger number and higher density of interconnects than conventional wire-bonds. Due to their geometry TSVs have relatively low capacitance and inductance, and thus provide high bandwidth operations and low power consumption [2].