Continuous membrane deformable mirror for adaptive optics using bimorph spring

We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4×4 electrode array is fabricated by utilizing plasma activated bonding and the subsequent all-dry release process. The fabricated deformable mirror deformed 3.8μm at 130V.