Multi-sensor wireless interrogation of SAW resonators at high temperatures

This paper presents for the first time, to the best of the authors' knowledge, successful wireless interrogation of a suite of harsh environment SAW temperature sensors and respective antennas operating at temperatures in excess of 900°C. The suite of langasite (LGS) SAW sensors, utilizing high-temperature Pt/Rh/ZrO
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thin-film electrodes, with the respective integrated antennas and the interrogator antenna were designed, fabricated, and verified to operate together in the same harsh environment conditions. The set of resonator based SAW sensors were simultaneously interrogated wirelessly in the frequency domain by a single transceiver. Multiple sensor temperature data has been obtained from the different sensors used.