25nm 64Gb 130mm² 3bpc NAND Flash Memory

25nm NAND technology-based 64Gb 3bpc NAND Flash memory with die size of 130mm
²
(6.15GB/cm2) is presented. The design including the array architecture is optimized for 25nm process technology while achieving world class performance of 100μs tRD, 2300μs tPROG for write throughput of 6.8MB/s with reliability meeting business requirements.