Ultrasonic probes having three orthogonal polarizations

Ultrasonic probes which can simultaneously generate and receive 2 orthogonal polarized shear (S¿ and S
_//
) and longitudinal (L) waves in screw shape have been presented. Thick piezoelectric films are directly fabricated onto the heads of such probes as L wave integrated ultrasonic transducers. S¿ and S
_//
waves are obtained using mode conversion method. Potential applications of such probes are discussed.