Development of MEMS component library with Modelica

For rapid modeling and simulation of MEMS, a MEMS component library consisting of beam, anchor, plate and gap is developed with Modelica. The hierarchy structure of this library are proposed. In order to show micro component's structure, pin definitions, parameters and behaviors of mechanical beam are analyzed and then the lumped parameter beam is modeled based on object-oriented method with Modelica. Simulation results of a cantilever beam show accordance with FEA simulations, which indicates that this model can achieve precision, efficiency, reusability and extensibility.