Proposal of surface topography observer considering Z-scanner for high-speed AFM

The purpose of this paper is implementation of fast imaging of AFM. In general AFM, the image is obtained from the control input of the Z-scanner. In this case, Fast imaging is prevented by the resonance peak of the plant. In authors' research group, the surface topography observer which is the surface topography estimating method based on the observer theory has been proposed. In this paper, the dynamic model used by authors' research group is improved, and the more detailed model is proposed. Therefore, the surface topography observer still faster than the conventional surface topography observer is proposed. Simulation and an experimental result show the effectiveness of the proposed method.