A Highly Scalable Interface Fuse for Advanced CMOS Logic Technologies

In this letter, we propose a novel interface fuse (iFuse) for low-power electrically programmable fuses in advanced CMOS applications. With an offset-landed metal-to-contact or contact-to-polysilicon structure, the iFuse can be programmed by substantially reduced current as compared to conventional fuses. A diagonal contact layout and the optical pattern correction scheme can further improve the cell stability as well as its programming characteristics.