A High Precision Optical Position Detector Based on Duo-lateral PSD

The development of precision-mechanic challenges the ability of position-detector. A high precision optical position detector is designed with a new type of position sensitive detector (PSD). The new type of PSD based on duo-lateral effect solves the position detection error (PDE) and non-linearity of normal PSD. The detector is constituted of low-noise JFET operation amplifiers, ADuC812 and LCM. The accuracy of the detector is truly calibrated with an actuator turned by a five phase step motor as the regulator and analyzed with the theory of uncertainty of measurement. The result of uncertainty analysis approves that the optical position detector designed based on duo-lateral PSD is very high-precision with only 1.922um uncertainty of measurement. Additionally, the detector works steadily in the noisy environment and it can suit for the industry application.