MEMS on robot applications

Two main problems in the manipulation of objects with robot-hands are the control of the contact force and the planning of approaching motion. In this paper, we report on the three types of MEMS sensors for robots to detect the contact forces, slippage and the distance to the objects to realize dexterous manipulation of objects with robot-hands. As a tactile sensor, we propose standing piezoresistive cantilevers and beams embedded in PDMS or viscous liquid. Since the standing cantilevers and the beams deform with the PDMS, the contact force can be measured by the resistance changes of the structures embedded in the PDMS. Additionally, the viscous liquid around the cantilever becomes the high-pass filter to detect the time variation of the contact forces. Also, we propose a proximity sensor using ultrasonic reflection to detect the distance between robot-hands and the target objects for grasping. By integrating the proposed three types of MEMS sensors on a robot-hand, approaching and manipulation will be realized. This will enlarge applications of the future robot as an assistant of our daily life.