HCI reliability control in HV-PMOS transistors: Conventional EDMOS vs. Dielectric RESURF and lateral field plates

This paper demonstrates that degradation mechanisms can be controlled by electric field tuning with Dielectric RESURF (STI -Shallow Trench Isolation- interleaves in the drain extension) and lateral field plates (gate fingers on top of the STI regions). Transistors, rated for max. V
ds
=5.5 and 20 V, show on-resistance (R
on
) of 6.5 and 40 mΩmm
²
respectively (comparable with optimized devices [1, 2]) and 10 years Hot Carrier Injection (HCI) lifetime in 65 nm CMOS technology.