Phase Noise Modelling in Parallel-plate MEMS variable capacitors

A CAD electromechanical model for phase noise simulation has been developed; it allows the simulation of the mechanical and RF behaviour for electrostatic MEMS devices taking Brownian noise into consideration. The model is implemented in commercial circuit software (ADS-based). The model is applied to study the effect of MEMS varactors in oscillator phase noise. The model describes the important nonlinear effects in the low frequency phase noise introduced by Brownian noise in the MEMS suspended membrane.