Electron Beam Stimulated Oxidation of Carbon (EBSOC)

The patterning of carbon nanostructures by electron beam stimulated oxidation is described. Sputter deposited carbon thin films and carbon nanotubes are locally oxidized in a scanning electron microscope using injected water vapor. The resulting structures are examined with scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Electrical resistance obtained post-processing is comparable to as-deposited values. Etched linewidths on the order of 20 nm are demonstrated along with sub-2 nm wide carbon wires.