2-D modeling of nanoscale multigate MOSFETs

Precise two-dimensional current and capacitance modeling of short-channel, nanoscale multigate MOSFETs is presented. The model covers a wide range of operating regimes, geometries and material combinations. The modeling in the subthreshold regime is based on conformal mapping techniques. In moderate to strong inversion, we obtain self-consistent results based on the 2-D Poisson¿s equation. The results are in excellent agreement with numerical simulations.