Modeling multilayer power distribution network by systematically incorporating via and cavity models

A closed-form expression for via barrel-plate capacitances is derived. This results in a more accurate equivalent circuit model for decoupling capacitors including both parasitic inductances and via capacitances. Multilayer power distribution network (PDN) are then analyzed by incorporating the circuit models of both vias and parallel plane pair. Circuit simulator is used to evaluate the coupling properties among various locations in the multilayer PDN structures.