Silicon Fishbone-Shaped Resonant-Frequency-Tunable MEMS Resonator

In this study, a silicon fishbone-shaped resonant-frequency-tunable MEMS resonator is designed and fabricated. The resonator can vibrate in larger amplitude than conventional doubly-fixed-beam resonator and resonant frequency characteristic is tunable by selectively choosing exciting electrodes. This new resonator should be useful for wider multi-band frequency applications, for example, reference oscillator of cellular phones and multi-band tunable filters.