Effect of Annealing and Electron Irradiation on Young's Modulus of Amorphous Carbon Pillars Grown by FIB-CVD

The paper reports on the effect of vacuum annealing and and electron shower irradiation on the Young's modulus of amorphous carbon pillars grown by focused-ion-beam-induced chemical vapor deposition, particularly at low acceleration voltages. TEM image revealed that many fine pores, were formed in the pillars after annealing at 600degC. It was shown that low-energy electron irradiation, is effective in increasing the Young's modulus of the pillar.