Contents 1. INTRODUCTION
Since its first introduction to MEMS in 1997 [1], SU-8 has enormously contributed to the advances of MEMS, either as high aspect-ratio mold or as permanent material [2]. A high transparency for wavelengths >400 nm makes SU-8 a suitable material for integrated optics applications [3]. Complementary to photolithography, inkjet printing is increasingly considered a cost-effective and flexible method for the fabrication of functional materials [4] such as conducting polymers [5]. The ease of mass fabrication and the inherent flexibility of inkjet technology makes it a suitable method for the manufacturing of polymer light emitting diodes [6]. Microlenses are typically fabricated using different techniques, such as manufacturing by melting photoresist [7] and transfer into fused silica and silicon. Inkjet printing of silica based inorganic-organic material has also been used as a post-processing technique for the fabrication of refractive microlens arrays [8].
