P5K-1 High Temperature Broadband Contact BAW Transducer

Aluminum nitride, AlN, point group 6 mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AIN can be used as a contact BAW transducer up to 600 C. The upper limit was set by coupling as opposed to element failure and it is anticipated that AIN can be used at temperatures substantially beyond this range.