Totally free-flexible Membrane for Low Voltage MEMS Metal Contact Switch

This paper presents results concerning an electromechanical DC-contact shunt switch based on a patented totally free-flexible metal membrane combined with an associated low temperature surface micromachining fabrication process. The electrostatic actuation enables an average measured actuation voltage of 9.2V for a 5μm out-of-plane membrane deflection. The switch exhibits low insertion loss (0.32 dB @ 10GHz) with good isolation (≫ 30dB @ 10GHz).