Robust μ control system for the optical ultra-precision vibration isolation system

The μ synthesis Robust control theory is based on the structural singular value, which is used in the control system of the active vibration isolation. It is used to solve the uncertainty of the optical ultra - precision instrument vibration isolation system. And the wavelet theory is used to analyze the random vibration signal in the time-frequency domain and get the low frequency signal from the random vibration signal. Then the robust μ controller designed by the μ synthesis Robust control theory is used to restrain the low frequency vibration. The simulation results prove that this method has shown good robustness and control precision in the vibration isolation of the optical ultra - precision instrument