Introduction
With decreasing device sizes radiation induced soft error rates (SER) become a serious problem for advanced CMOS circuits. Soft errors in micro electronic components are induced either by alpha emitters within the process material or by external irradiation with terrestrial neutrons caused by cosmic radiation [1]. The generation mechanism of soft errors depends on parameters like the critical charge Qcrit, the collected charge Qcoll as well as the feature size [2], [3].