Micromechatronics for Industrial and Research Applications
In microscale, the important technologies are micromachine, micromechatronics, microfabrication, and assembly for micromechatronics. Recently, borderless applications, such as microbiology, wet mechatronics, micrototal analysis system, micromedical engineering, and regenerative medical engineering, have been investigated. Table 3 shows the examples of microdevices used in research areas. Various microdevices, such as the microactuator, microink-jet head, microforce sensor, microtactile sensor, microfuel battery, microfluidics device, and blood vessel simulator, are investigated.